JPH075416Y2 - ガスレートセンサ - Google Patents

ガスレートセンサ

Info

Publication number
JPH075416Y2
JPH075416Y2 JP1990003858U JP385890U JPH075416Y2 JP H075416 Y2 JPH075416 Y2 JP H075416Y2 JP 1990003858 U JP1990003858 U JP 1990003858U JP 385890 U JP385890 U JP 385890U JP H075416 Y2 JPH075416 Y2 JP H075416Y2
Authority
JP
Japan
Prior art keywords
gas
casing
pump
rate sensor
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990003858U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0395965U (en]
Inventor
泰諄 勝野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tamagawa Seiki Co Ltd
Original Assignee
Tamagawa Seiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tamagawa Seiki Co Ltd filed Critical Tamagawa Seiki Co Ltd
Priority to JP1990003858U priority Critical patent/JPH075416Y2/ja
Publication of JPH0395965U publication Critical patent/JPH0395965U/ja
Application granted granted Critical
Publication of JPH075416Y2 publication Critical patent/JPH075416Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)
  • Measuring Oxygen Concentration In Cells (AREA)
JP1990003858U 1990-01-22 1990-01-22 ガスレートセンサ Expired - Lifetime JPH075416Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990003858U JPH075416Y2 (ja) 1990-01-22 1990-01-22 ガスレートセンサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990003858U JPH075416Y2 (ja) 1990-01-22 1990-01-22 ガスレートセンサ

Publications (2)

Publication Number Publication Date
JPH0395965U JPH0395965U (en]) 1991-09-30
JPH075416Y2 true JPH075416Y2 (ja) 1995-02-08

Family

ID=31507650

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990003858U Expired - Lifetime JPH075416Y2 (ja) 1990-01-22 1990-01-22 ガスレートセンサ

Country Status (1)

Country Link
JP (1) JPH075416Y2 (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6897100B2 (en) 1993-11-05 2005-05-24 Semiconductor Energy Laboratory Co., Ltd. Method for processing semiconductor device apparatus for processing a semiconductor and apparatus for processing semiconductor device
JP4630961B2 (ja) * 2002-08-14 2011-02-09 服部 惠嗣 万華鏡および万華鏡用映像ソフト

Also Published As

Publication number Publication date
JPH0395965U (en]) 1991-09-30

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